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MEMSnet Home: MEMS-Talk: Using Chrome as etch mask
Using Chrome as etch mask
2007-03-16
Leyla Soleymani
2007-03-16
WANG,TAK
2007-03-16
Karthik Kumar
2007-03-19
Barbara Cortese
Using Chrome as etch mask
Barbara Cortese
2007-03-19
You should correct the amount of H2O...I think 985 ml are too much!

> This is what I used to etch Cr.  It should be safe with oxide.  You need
> to check if it is OK with PMMA.  There are also commercial etchants you
> can buy.
>
> Nichrome Etch: 155 g (NHb4)2Ce(NO3)6  (Ceric Ammonium Nitrate) + 60 ml
> HNO3 + 985 ml H2O
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