Pinholes are usually a result of particles that mask the evap'ed metal -
either clean the substrates well of coat thicker than the diameter of the
particles.
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Yue Mun Pun, Jeffrey
Sent: Monday, March 19, 2007 8:20 AM
To: General MEMS discussion
Subject: [mems-talk] Pin holes in evaporated Chromium, Titanium and Gold

Hi,
I'm just wondering if anybody has observed pin holes in thermally or e-beam
evaporated Chromium, Titanium and Gold.  If so, how thick do I have to
evaporate these metal films for the pin holes to disappear?