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MEMSnet Home: MEMS-Talk: Pinholes in Evaporated Gold film
Pinholes in Evaporated Gold film
2007-03-23
Yue Mun Pun, Jeffrey
Ultra-thin silicon wafers
2007-03-24
Andrea Mazzolari
Pinholes in Evaporated Gold film
Yue Mun Pun, Jeffrey
2007-03-23
Hi,
I am trying to evaporate Gold on uncrosslinked SU-8 film.  Is 100nm a
sufficiently thick layer to block UV light in i-line processing?  Also has
anyone seen pinholes in evaporated gold film?  If so, how thick or what must I
do to avoid pinholes in gold films?

Jeffrey
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