Hi,

We do multiple coatings of PMMA to have a thicker layer. We do a softbake after
each spinning.

Good luck,

Virginia Soares
INESC-MN
R.Alves Redol,9
1000-029 LISBOA
PORTUGAL
www.inesc-mn.pt
Tel:+ 351 21 3100 300 ext.2504
Fax: +351 21 314 58 43

-----Original Message-----
From: Leyla Soleymani [mailto:[email protected]]
Sent: domingo, 25 de Março de 2007 18:31
To: General MEMS discussion
Subject: [mems-talk] Multiple coatings of PMMA

Hi,

I am using PMMA A2 or PMMA A3 for ebeam lithography. In order to get a
better BOE etch mask, I would liket to have a thick PMMA layer. Can I
spin the PMMA multiple times? If so does anyone know if I should
softbake and respin or spin multiple times before softbake? I would
really appreciate your help.

R