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MEMSnet Home: MEMS-Talk: Tungsten 'W' etch
Solvent spin-on PDMS
2007-03-29
Benedict Samuel
2007-03-30
Joseph Grogan
2007-03-30
Keunho Ahn
2007-03-30
Barbara Cortese
2007-03-30
Heiko van der Linden
Tungsten 'W' etch
2007-03-30
shimul saha
2007-03-30
Anil Agiral
2007-03-31
Andrea Mazzolari
Silicon carbide wet etch
2007-03-30
Andrea Mazzolari
Tungsten 'W' etch
Andrea Mazzolari
2007-03-31
Hello,

H2O2 should etch W, i don't remeber etch rate.

best regards,
Andrea

> Hello,
>
>   Can anyone please tell us a recipe for Tungsten 'W' wet etch. Any advice
> will be greaty helpfull. Thanking you.
>
>   Best regards,
>   Shimul Chandra Saha
reply
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