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MEMSnet Home: MEMS-Talk: Polysilicon Deposition
Polysilicon Deposition
2007-04-01
David Thomson
Polysilicon Deposition
David Thomson
2007-04-01
Hi,

I need to get 4um of polysilicon deposited onto inch square SOI
samples. I know that 4um is quite a lot to deposit so I am
considering sputtering silicon on and then annealing to form the
poly. Does anyone know of anywhere that can perform this task.

Cheers,

Dave
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