They are 50-60um at the bottom and 30um at the top, thus a positive slope!
thanks

On 4/3/07, Gareth Jenkins  wrote:
> Exposure with <340nm leads to negative sidewall slopes rather than
> postive which is the observed problem unless I misread it.
> Abhishek, are the structures 30um at the top and 60um wide at the
> bottom? If it's the other way round (60 at the top, 30 at the bottom)
> then a filter could indeed be the answer.