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MEMSnet Home: MEMS-Talk: Organic residue etching
Organic residue etching
2007-04-04
Sreemanth M Uppuluri
2007-04-04
[email protected]
Adhesions between interfaces of: SU8 on parylene on silicon
2007-04-05
Yu, Zeta (Tak For)
Adhesions between interfaces of: SU8 on parylene onsilicon
2007-04-05
Bill Moffat
Organic residue etching
Sreemanth M Uppuluri
2007-04-04
Hello All,

I am working with Chromium/Aluminum/Chromium coated quartz substrates and I
am trying to etch some organic residues sticking to the top chromium film. I
have seen in the literature that Piranha or RCA are recommended for organic
residue etching. I am wondering if these solutions are going to affect the
underlying metal films as well (which I definitely do not want to happen).
Please let me know if you have any suggestions.

Thanks,
Sreemanth

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