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MEMSnet Home: MEMS-Talk: Aluminium Oxide
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2007-04-06
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Aluminium Oxide
2007-04-10
Hongzhi CHEN
Aluminium Oxide
Hongzhi CHEN
2007-04-10
Have anyone used the Aluminium as the electrode before? I have couple of
questions:
  1. The Aluminium will oxidize itslef, formed aluminium oxide. Is anyone knows
the exact thickness of that, and what condition can control this thickness? (I
just know it is less than 10nm).
  2. If people use Aluminium as the electrode, is that mean if the applied
voltage is small, there will be no current flow due to the aluminium oxide?
  3. Then how much voltage is enough to cause the tunneling through this thin
oxide, and cause the current flow?
  4. I want to use this alluminium as an insulator, is anyone can recommend some
papers about this?

  Thank you very much for your help.

  CHEN
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