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MEMSnet Home: MEMS-Talk: Etching Vertical Holes in Si 110 wafer
Etching Vertical Holes in Si 110 wafer
2007-04-16
Sudarshan Hegde
2007-04-16
[email protected]
2007-04-16
Shao Guocheng
2007-04-17
Sudarshan Hegde
2007-04-17
Shao Guocheng
2007-04-18
Pradeep Dixit
2007-04-17
Christopher Striemer
Etching Vertical Holes in Si 110 wafer
Shao Guocheng
2007-04-17
sorry, I thought u just need two vertical walls. I'm not sure about the hole
with four vertical walls

  Regards

  guocheng shao

Sudarshan Hegde  wrote:
  Hi Shao
The paper was helpful regarding the methods dealing with perfect aligning.
Thanks a lot.
This paper discusses deep but long channels.
In principle, (given that the alignment is perfect) is it possible to get
vertical holes. i.e., four vertical walls ?
Thanks and regards
Sudarshan Hegde
reply
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