A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Al oxide
Etching of intermetallic CuAu
2007-04-17
P.E.M. Kuijpers
Al oxide
2007-04-18
Hongzhi CHEN
Al oxide
Hongzhi CHEN
2007-04-18
Hello,

I am trying to use the native Aluminium oxide as the
insuloator, since if we expose the it in the air, Al
will oxidize itself to form severl nm aluminium oxide.
But when I expose that to the air to about 2 days, it
does not work.

Is there any special treatment should be done, or just
leave it to the air? Or is there any way can
accelerate the oxidation?

Thank you for any advice.

Chen
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Addison Engineering
The Branford Group
MEMStaff Inc.