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MEMSnet Home: MEMS-Talk: Re: Al oxide
Re: Al oxide
2007-04-19
Ning Wu ([email protected])
2007-04-20
Hongzhi CHEN
2007-04-20
Gary
Re: Al oxide
Ning Wu ([email protected])
2007-04-19
Hongzhi,

I believe that native Aluminium oxide layer is very thin, just like native
silicon oxide, which may not be thick enough to be used as a insulating layer.

Ning

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