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MEMSnet Home: MEMS-Talk: Re: Al oxide
Re: Al oxide
2007-04-19
Ning Wu ([email protected])
2007-04-20
Hongzhi CHEN
2007-04-20
Gary
Re: Al oxide
Hongzhi CHEN
2007-04-20
Dear Ning,

Thank you for your reply. Because I read one science
paper using the native aluminium oxide as the
insulaotr for the carbon nanotube transistor and they
did not mention any special treatment. I try to heat
it up to 400oC, hopefully I will get a thicker oxide.

Sincerely yours,
CHEN Hongzhi

--- "Ning Wu ([email protected])" 
wrote:

> Hongzhi,
>
> I believe that native Aluminium oxide layer is very
> thin, just like native silicon oxide, which may not
> be thick enough to be used as a insulating layer.
reply
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