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MEMSnet Home: MEMS-Talk: Re: MEMS mask layout software
Re: MEMS mask layout software
1995-10-04
Brett Warneke
1995-10-04
Beverley Eyre
1995-10-04
Evan D. H. Green
1995-10-05
Ashok Srivastava
1995-10-06
JGS@enga.bu.edu
1995-10-06
Brent_Burns@ccmail.northrop.com
1995-10-07
Ash Parameswaran
1995-10-19
IntelliS@aol.com
1995-10-20
Brett Warneke
Re: MEMS mask layout software
JGS@enga.bu.edu
1995-10-06
We have been using Cadkey for a number of years, and for hundreds
ofmaskdesigns, it is similar to Autocad, so we use it also for three
dimensional drawings. We make our own masks, by cutting rubylith, and using a
step-and repeat camera.Of course, it has no built-in design rules, so you have
to understand your process, and be aware of film thicknesses, underetching
rates, anisotropy in processing, etc. If there is anything we can do to help,
let me knw, it would certainly be possible for us to make some simple emulsion
masks, at a relatively low price,

Jan Smits,
Assoc Prof.
Boton University.


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