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MEMSnet Home: MEMS-Talk: ask for reference on gold-gold thermal compress wafer bonding
ask for reference on gold-gold thermal compress wafer bonding
2007-04-27
胡小东
ask for reference on gold-gold thermal compress waferbonding
2007-04-27
Sood, Sumant
ask for reference on gold-gold thermal compress wafer bonding
胡小东
2007-04-27
Hi,All,

    Would someone give some useful references on gold-gold thermal compress
wafer bonding?
    I'd like to bonding wafers by this mean. There is a book named
"semiconductor wafer bonding: science and technology". I'm buying it, but it
will takes months for us to get the book.
    So any electronic version paper on the subject?
    Thanks!
                               Hu Xiaodong
                               Hu_xiaodong@163.com
                               Hebei Semiconductor Research Institute
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