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MEMSnet Home: MEMS-Talk: dramatic change in resistance of tungsten-titanium alloy
dramatic change in resistance of tungsten-titanium alloy
2007-04-27
Joseph N
dramatic change in resistance of tungsten-titanium alloy
Joseph N
2007-04-27
Hallo all,
I'm doing some tests with a heating structure from tungsten-titanium alloy,
above which there is a silicon nitride layer for passivation. A room temperature
fluid is applied on the SiN layer. It had worked ordinarily with resistance c.a.
1 kohm for around 5 hours, then the resistance suddenly jumped to 380 kohm,
which seems nearly brocken. Acctually the current was constantly observed to be
5 mA before the drastic change.
What could be the problem? Any advice would be appreciable.

win2
reply
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