Hello,
If you try with Cr or Ni/Cr layer, I hope your problem will be solved.
Use 20-30nm of Ni/Cr or Cr and it will work perfectly as a adhesion
layer and Ag will not peel off.
Thanks,
Mamun


***************************************************************
Mamun-Ur-Rashid
PhD Candidate
Orion 1.12
Centre for Nano& Microsystems
School of Science & Technology
University of Teesside.
TS1 3BA. U.K.
01642342428
www.mamun.info


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Xinhua Zang
Sent: 30 April 2007 19:48
To: [email protected]
Subject: [mems-talk] Adhesion Layer for Ag and Al

Hi All,

Recently I evaporated Al and Ag onto a silicon substrate with thermal
oxide.
I did not use any adhesion layer. Al layer seems to be ok, but Ag layer
is
peeling off. Could some body suggest an adhesion layer for Ag like Cr or
Ti.