Hi Ciro
You can make your alignment marks on the Si wafer (master) itself. The
alignment can be made precise if you do it under a microscope or a big
magnifying glass.
Hope this helps
cheers
-Abhishek

On 5/1/07, Ciro Chiappini  wrote:
> Hi and thanks in advance
> I will need to align two PDMS (or other transparent polymer) halves
> with micrometric precision and then make them contact in order to
> bind. at first I was thinking of using the EVG 620 aligner or any
> other photolithography aligner or this purpose, but I'm concerned
> about the clearance since the PDMS mold is much thicker than a wafer
> and once the two halves come in contact they are permanently bound.
> Also I will need to stick one of the halves to a dummy mask in order
> for it to be held in place. Do any of you know about commercially
> available alignment stages for this kind of purposes? I will only need
> an alignment stage, since we already have plenty of microscopes for
> optical visualization.


--
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Microfluidics Lab (Prof. J.D. Posner)
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Arizona State University
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