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MEMSnet Home: MEMS-Talk: Alignment stage
Alignment stage
2007-05-01
Ciro Chiappini
2007-05-02
Abhishek Jain
2007-05-02
Ciro Chiappini
2007-05-02
Peng Li
2007-05-02
Gareth Jenkins
2007-05-02
Oliver Horn
Alignment stage
Ciro Chiappini
2007-05-02
Hi Abhishek

Thank you very much for your prompt response.

For sure I'm planning to have alignment mark on the Si Master. But I
will need micrometric precision PDMS alignment, since the features I'm
considering are around 20 um and are present on both PDMS layers, so I
don't think manual alignment under a microscope will allow me such a
precise result.

Ciro Chiappini, Ph.D. Student
 Biomedical Engineering - UT-Austin
 Dr. Mauro Ferrari Nanomedicine Group

- Hide quoted text -
On 5/1/07, Abhishek Jain  wrote:
> Hi Ciro
> You can make your alignment marks on the Si wafer (master) itself. The
> alignment can be made precise if you do it under a microscope or a big
> magnifying glass.
> Hope this helps
> cheers
> -Abhishek
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