Hey Ciro,

As for your concerns of the binding of two PDMS layer, you can dip the
PDMS into methanol for 5 mins before alignment. Then, you can actually
move the PDMS around when the two layer come into hard contact. This can
prevent binding of two layers after plasma treatment. If you want to have
a permanent bind, you can heat the aligned layers up to 85C for 80 mins.
It will give you a nice bind.

I was doing this all the times manually even without microscope. The
accuracy is poor. I am also wondering what kind of aligner can I use for
this purpose.

Peng Li


> Hi Abhishek
>
> Thank you very much for your prompt response.
>
> For sure I'm planning to have alignment mark on the Si Master. But I
> will need micrometric precision PDMS alignment, since the features I'm
> considering are around 20 um and are present on both PDMS layers, so I
> don't think manual alignment under a microscope will allow me such a
> precise result.
>

Peng Li
Research Assistant
Department of Mechanical Engineering & Applied Mechanics
University of Rhode Island
133D Kirk, 92 Upper College Road,
Kingston, RI  02881
Phone: (401) 874-2247