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MEMSnet Home: MEMS-Talk: cleaning sapphire and CVD SiC
cleaning sapphire and CVD SiC
1998-02-12
[email protected]
cleaning sapphire and CVD SiC
[email protected]
1998-02-12
Folks,

We have stuck Al plus some multilayers of W/Si to both a sapphire and a  CVD
SiC flat. These were extremely smooth, i.e. in the subnm range.  We would like
to remove these coating chemically  or electrochemically without damaging the
inherent smoothness of the sapphire or CVD SiC.

Any suggestions?


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