Ren, we have coated 100 nm thick organic films, defect free 1 nm TIR
variability.  The material is the viscosity of water.  I would think that
if you used pmma thinned and cast a film of deep blue you would be very
close to having what you need.


-----Original Message-----
From:   Ren Yang [SMTP:[email protected]]
Sent:   Thursday, May 03, 2007 1:44 PM
To:     [email protected]
Subject:        [mems-talk] 100nm coating for E-beam lith

Hi, All!

Is there any commerical E-beam resist can be coated to
100nm or even thinner?