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MEMSnet Home: MEMS-Talk: bonded wafers dice
bonded wafers dice
2007-05-09
kris
2007-05-09
Shay Kaplan
2007-05-09
David Nemeth
2007-05-10
P.E.M. Kuijpers
bonded wafers dice
kris
2007-05-09
Hello,

I was wondering if we can dice a Au-Au
thermocompression bonded wafer pair using the diamond
saw.

I need individual dies from the wafer pair to go for
the etch trails.

Your suggestions are highly appreciated.

Thanks,
Kris
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