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MEMSnet Home: MEMS-Talk: bonded wafers dice
bonded wafers dice
2007-05-09
kris
2007-05-09
Shay Kaplan
2007-05-09
David Nemeth
2007-05-10
P.E.M. Kuijpers
bonded wafers dice
Shay Kaplan
2007-05-09
If the bond is good - no problem. If it's going to fall apart - the bond is
bad.

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of kris
Sent: Wednesday, May 09, 2007 5:32 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] bonded wafers dice

Hello,

I was wondering if we can dice a Au-Au
thermocompression bonded wafer pair using the diamond saw.

I need individual dies from the wafer pair to go for the etch trails.

Your suggestions are highly appreciated.

reply
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