For thickness less than about 0.25 microns, you can use electroless gold:
http://www.transene.com/au.html  (For example)

David Nemeth

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of kris
Sent: Wednesday, May 09, 2007 10:55 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Au electroplating

Hello All,

IS there a method to produce stress free Au
electroplated structures??

I am using sulphite bath and 1.5mA/cm^2 of the current
density. Ni is used as the seed layer.

Please let me know your suggestions.