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MEMSnet Home: MEMS-Talk: How to etch SU8 from Nickel structure?
How to etch SU8 from Nickel structure?
2007-05-14
Simon Zhang/gcemarket
2007-05-14
Dubnisheva, Anna
2007-05-19
Shigetomo SHIKI
How to etch SU8 from Nickel structure?
Simon Zhang/gcemarket
2007-05-14
Anyone knows good wet or dry etching method for etching SU8 from Nickel
structure ?

Thanks and regards,

Simon Zhang
reply
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