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MEMSnet Home: MEMS-Talk: BCB
BCB
2007-05-23
saravan kallempudi
2007-05-24
deepa sree
BCB
deepa sree
2007-05-24
Saravan,

Are you curing BCB in the manufacturer's suggested low oxygen oven? We faced
similar problems and bought another oven which purges oxygen from the chamber
before raising the temperature to cure. It seems to fix it.

Deepa

saravan kallempudi  wrote: Hello,

I need spin BCB over patterned Gold, and Nickel.  Well  I am worrying about the
cracks during curing of BCB.
Any suggestions  ?
reply
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