Kris--
Yes, XeF2 etches W, Ti, Mo, and pretty much anything else that forms a
volatile fluoride.
The etch rate for these metals is significantly slower than for Si, so you
may be OK if you can tolerate some loss of your W layer.
    --Kirt Williams

----- Original Message -----
From: "kris" 
To: 
Sent: Thursday, May 24, 2007 12:57 AM
Subject: [mems-talk] XeF2 etch on W


> Hello,
>
> I am using XACTIX to etch Si. I have Tungsten layer on
> silicon. I was wondering if XeF2 etches Tungsten.