Plasma etch and patience can do the job ;).
Various oxygen plasma etch recipes for parylene have been reported (do
eg a quick Google Scholar search on it).
You can use resist as a mask but make sure it's (much) thicker than your
parylene film; you can afterwards wash away the resist with acetone or
your solvent of choice (the parylene will be inert in pretty much any
solvent/etchant). I wouldn't recommend sonicating it though (depending
on how good your parylene adheres to whatever your substrate is).
Cheers,
Dirk


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Leyla Soleymani
Sent: Wednesday, May 23, 2007 11:41 PM
To: General MEMS discussion
Subject: [mems-talk] Parylene patterning

Hi everyone,

Does anyone have any experience with patterning parylene? Can we do
ebeam lithography or phtolothography on this? If so what resist should
be used, how is it supposed to be etched and how is the resist removed
without damaging the parylene?