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MEMSnet Home: MEMS-Talk: E-beam evaporation of Chrome on uncrosslinked SU-8
E-beam evaporation of Chrome on uncrosslinked SU-8
2007-05-29
Yue Mun Pun, Jeffrey
2007-05-29
shay kaplan
amount of swelling
2007-05-30
Rajib Ahmed
2007-05-30
Matthew Coda
Diamond
2007-05-31
Andrea Mazzolari
2007-05-31
shay kaplan
2007-05-31
Andrea Mazzolari
2007-06-01
Rick Williston
E-beam evaporation of Chrome on uncrosslinked SU-8
shay kaplan
2007-05-29
Jeff,
I think the illumination from the source (boiling chrome is ~2700deg C) will
expose the SU8.

Shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Yue Mun Pun, Jeffrey
Sent: Tuesday, May 29, 2007 11:10 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] E-beam evaporation of Chrome on uncrosslinked SU-8

Hi,
I would like to evaporate chromium on uncrosslinked SU-8.  Can anyone tell
me if this is possible even if a low rate of evaporation is used?  Thanks.
reply
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