You need to use DHF to clean the fused quartz wafers. Nothing else etches
quartz, I am sure you found it out the (Acetone & Methanol) and even Piranha
wouldn't work.
I do have system can do DHF cleaning and rinse dry in same foot print.
Best regards,

Mehmet Delikanlioglu
Semi-Equipment & Service Co.
PO Box 54922
Hurst, TX 76054
mehmet@kimmonquartz.com
Mobile 817-946-0584


----- Original Message -----
From: "Julie Houser" 
To: "'General MEMS discussion'" 
Sent: Wednesday, May 30, 2007 11:56 AM
Subject: RE: [mems-talk] Fused Quartz Cleaning


> Hi Sreemanth,
> If you don't find a cleaning solution that works, I could possibly
> repolish
> it depending on the amount of material that can be removed.