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MEMSnet Home: MEMS-Talk: Gold deposition on uncrosslinked SU-8
Gold deposition on uncrosslinked SU-8
2007-05-27
nidhi maheshwari
2007-06-01
Maria Nordström
Gold deposition on uncrosslinked SU-8
Maria Nordström
2007-06-01
Dear Nidhi,

Look at the paper by D. Haefliger and A. Boisen where they print an Au mask onto
non-crosslinked SU-8: J.Micromech.Microeng. 16 (2006) 951-957. (You can find it
on our webpage:
http://www.mic.dtu.dk/Research/NSE/Nanoprobes/Publications/Journal%20Papers.aspx
)

Direct evaporation of metals (Au or Cr) onto non-crosslinked SU-8 does usually
not work that well due to the heating effects.

Sincerely,
Maria Nordström
MIC - Department of Micro and Nanotechnology
Techical University of Denmark


-----Original Message-----
From: nidhi maheshwari [mailto:nidhim15@gmail.com]
Sent: 27. maj 2007 17:07
To: mems-talk@memsnet.org
Subject: [mems-talk] Gold deposition on uncrosslinked SU-8

Hi All,
I am looking for a process by which i can have around 50nm thick gold film on
uncrosslinked SU-8. The process should be such that it does not croslinkes the
SU-8 present. The substrate on which i am coating SU-8 is glass. Any suggestion
to this would be highly appreciated.



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