A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: Hillrocks Generated during TMAH Etching
Re: Hillrocks Generated during TMAH Etching
2007-06-01
kris
2007-06-04
李科佳
2007-06-05
kris
Re: Hillrocks Generated during TMAH Etching
kris
2007-06-01
Hello,

Are you adding dissolved silicon or Ammonium peroxy
disulphate (APODS) to your solution??

I was wondering if the TMAH solution is 25% weight in
water?? or Alchohol??

Thanks

Kris
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Harrick Plasma, Inc.
MEMS Technology Review
Nano-Master, Inc.