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MEMSnet Home: MEMS-Talk: remove SU8 dry etching
remove SU8 dry etching
2007-06-14
Zhang Xiao Qiang
2007-06-14
[email protected]
remove SU8 dry etching
Zhang Xiao Qiang
2007-06-14
Hi, Dear collegues

I would like to remove the  SU8 dry etching after electroplating. The
thickness is about 20 micron. Do you think it is feasible? Anyone like
share your experience and recipe with me? Thanks a lot.

Thank you & have a nice day!
Best regards!

Dr. Zhang XiaoQiang

[email protected]

reply
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