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MEMSnet Home: MEMS-Talk: Drie support wafer
Drie support wafer
2007-06-14
ashwini jambhalikar
2007-06-14
[email protected]
2007-06-14
Jim Beall
2007-06-15
Xiaoguang Liu
2007-06-15
Jim Beall
2007-06-18
Xiaoguang Liu
2007-06-15
Xiaoguang Liu
(211) silicon wafers
2007-06-16
Andrea Mazzolari
Drie support wafer
Xiaoguang Liu
2007-06-15
Hi Jim

What support wafer would you use? Is it silicon also? How would you prevent
the support wafer from being etched? Thanks a lot.

Best
Leo

On 6/14/07, Jim Beall  wrote:
>
> We use a thin layer of Crystalbond 509C wax to bond Si wafers to
> backing wafers. You have to watch out for bubbles in the wax or you
> can have die pop up.
>
reply
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