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MEMSnet Home: MEMS-Talk: Increasing PDMS bonding to glass without using oxygen plasma
Increasing PDMS bonding to glass without using oxygen plasma
2007-06-19
Virginia Abranches de Sousa R. Soares
2007-06-19
Kevin Christ
Increasing PDMS bonding to glass without using oxygen plasma
Virginia Abranches de Sousa R. Soares
2007-06-19
Dear Listers,

Our plasma tool has broken down and we are looking for alternative ways of
getting an irreversible bond between PDMS and glass.

We have searched the web but so far could not find anything that would not
include an oxygen or an argon plasma.

Does anybady know if there is some chemical treatment that would increase the
bonding strength of PDMS?

Thank you in advance,

Virginia Soares
INESC - Microsystems and Nanotecnologies
Lisbon
Portugal
www.inesc-mn.pt

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