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MEMSnet Home: MEMS-Talk: About Bonding
About Bonding
2007-06-19
Hanfei Wang
About Bonding
Hanfei Wang
2007-06-19
Dear Friends,

I currently need to bond Si chips (1.5cmX1.5cm with 300nm SiO2) to another
substrate. This device should tolerate 900 degree high temperature. Does
anybody has such experience?

Thank you.
Hanfei Wang
reply
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