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MEMSnet Home: MEMS-Talk: Wafer-level bonding using SU-8
Wafer-level bonding using SU-8
2007-06-20
Chih-Chieh Cheng
Wafer-level bonding using SU-8
Chih-Chieh Cheng
2007-06-20
Hi, everyone

I am trying to bond two quartz wafers (Fused Silica) using su-8 as the
intermediate layer to package the RF MEMS switches. Does anyone know if the
curing process of SU-8 involves outgasing? Will that seriously harm the
switches?

Thanks

Chih-Chieh
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