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MEMSnet Home: MEMS-Talk: Inquiry regarding sidewall deposition of wafers in e-beam metalization
Inquiry regarding sidewall deposition of wafers in e-beam metalization
2007-06-26
polly
Inquiry regarding sidewall deposition of wafers in e-beam metalization
2007-06-26
shay kaplan
Inquiry regarding sidewall deposition of wafersin e-beam metalization
2007-06-26
Bill Moffat
Inquiry regarding sidewall deposition of wafers in e-beam metalization
polly
2007-06-26
Dear Sir,

i would like to know if in e-beam metallization, the sidewall (300 micron
thickness face) also get coated with metal(Aluminum). Kindly also refer me some
good tutorial materials in the metalization area.

Regards
Pourus
reply
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