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MEMSnet Home: MEMS-Talk: Low temperture anodic bonding between glass and silicon
Isotropic silicon etch
2007-06-27
Chilcott, Dan W
2007-06-27
Kirt Williams
2007-06-27
David Nemeth
2007-06-29
Chilcott, Dan W
Low temperture anodic bonding between glass and silicon
2007-06-27
Robert Lindegren
2007-06-27
[email protected]
2007-06-28
Shao Guocheng
Low temperture anodic bonding between glass and silicon
Robert Lindegren
2007-06-27
Hi.

I'm looking for a specific type of  glass suited for low temperature
anodic bonding between silicon and glass. I company called Hoya, Japan,
had a prototype glass called (HOYA Co.: Prototype PS-100) and according
to a paper from -97 anodic bonding at temperatures below 180 degrees
Celsius could be achieved. The glass is some type of  (Lithium
alminosilicate-beta-quartz glass-ceramic) according to their
specification. Hoya do not however supply this type of glass any more.

I would like to try the anodic bonding at a maximum temperature at 200
degrees Celsius with a relative high area bonding yield but where the
bonding strength not is a critical parameter. I have found some papers
where the borofloat 33 glass has been bonded at a temperature at 200
degrees Celsius.

Do any one have any idea if there are any similar products to the HOYO
prototype glass or any other information that could help me with this issue.

Best regards
Robert Lindegren
reply
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