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MEMSnet Home: MEMS-Talk: Patterning gold on PDMS
Patterning gold on PDMS
2007-06-28
Yue Mun Pun, Jeffrey
Patterning gold on PDMS
Yue Mun Pun, Jeffrey
2007-06-28
Hi,
I am trying to make a structure that makes use of the difference in thermal
expansion of SU-8, PDMS and gold for actuation.  The structure consists of a
cylinder of PDMS encased by a surrounding layer of SU-8.  One end of these 2
layers will be covered by a thin film of gold (100nm), while the other end will
be heated up.
Does anyone have any experience in doing standard photolithography work on PDMS?

Jeffrey
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