Hi All,

  I made a SU8 2075 molds with Mylars mask. My problem is that all diagonal
features are peeled off after 5-6 minutes in SU8 developer, while almost of all
vertical and horizontal lines or dots are still firmly attached on the silicon
wafer. Here are main steps of the protocol: clean Si wafer with BOE, spin coat
SU8, soft bake, UV exposure, PEB and then SU8 developer. The diagonal features
are 10 um (width) x 80 um (height), the other features are 40 um or up. By the
way, this is my first time to use mylars mask for making SU8 2075 molds. I had
no problem of using the similar protocol with glass/Cr masks for making other
SU8 molds.
  Could somebody assist me with his/her own experience or suggest a reference?

  Wang