Another potential complication that we've run into is resist outgassing.
You might want to vacuum bake your substrate before doing the deposition.

-Mike Martin
 U. of Louisville

>>> sokwon Paik  7/5/2007 10:11 AM >>>
Jesse,

  Thank you for your mentoring.

  It was very helpful and made one questions.

  What kind of evaporator you use?

  I tried even lower deposition rate than you and it seems I need to
  use the same machine as you for the platinum coating.

  Thank you,

  Sokwon