Hello,
For the micro fabricated bio chip/ micro fluidic devices Class 1000/100
required, although it is dependent on the fabrication protocol and
materials as well as dimension. Usually polymer based micro fluidic
devices demand class 1000/100 for the fabrication. For the cleaning you
can use Decon 90 and followed by IPA in the ultrasonic bath. It will
remove micro/nano monomer.
Regards,

Mamun Rashid
PhD Candidate
Centre for Nano & Microsystems
University of Teesside
TS1 3BA. U.K
www.mamun.info

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of hammouche khales
Sent: 06 July 2007 02:59
To: [email protected]
Subject: [mems-talk] polymer fabrication

Hellos all, I have some questions if there is one ho need to help me!
- i need to have some informations for polymer fabrciation (especially
using PDMS ),  and if there is contaminations problems with CMOS
process?
- what the clean room class if we need to fabricate bio-chip (or
microfluidic devices)?