The lowest cost is to buy bunch of 4" wafers and have them laser cut down to
2" wafers.

Thank you and Best regards,

JTD
S3C
1010 Stewart Drive
Sunnyvale, CA 94085
Tel:  408-746-3081 Ext. 228
Fax: 408-746-9481
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Morten Aarøe
Sent: Thursday, June 28, 2007 5:23 AM
To: General MEMS discussion
Subject: [mems-talk] 2" SOI wafer supplier

To all,

Does anyone have any knowledge of a supplier of 2" SOI wafers. More
specifically I need approximately 1um device layer (can be polysilicon!)
and a couple of um buried oxide. I will need 20 such wafers.

The few replies from manufacturers I have got say that either they will
cost 200+ EUR a piece or that they simply do not make them. I find it
slightly annoying having to pay almost double the price of a similar
4"/100mm wafer for something with one quarter the area.

Hope someone can help me. In the end I might have to make them on my own
using standard 2" Si wafers (about 15-20 EUR a piece), oxidizing them
and finally depositing a 1um layer of polysilicon on top.