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MEMSnet Home: MEMS-Talk: micro/macro Porous silicon formation
micro/macro Porous silicon formation
2007-07-11
LSujatha
2007-07-11
Miyakawa, Natsuki
micro/macro Porous silicon formation
LSujatha
2007-07-11
Dear friends,

Microporous is formed by electrochemical etching of silicon in HF+ethanol
(aqueous electrolyte) on p-type (100)wafer with 1-10 ohm-cm resistivity.

Macroporous is formed by electrochemical etching of silicon in HF+DMF
(Dimethyl formamide) (organic electrolyte) on the same wafer mentioned
above.

My questions are:

1. What is the theory behind for the formation of macroporous on p-type
silicon with HF+DMF? i.e. Why is it macropores?

2. Why the electrolyte HF+ethanol is called aqueous and the electrolyte
HF+DMF is called organic?
reply
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