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MEMSnet Home: MEMS-Talk: plasma etching of SiO2 and its selectivity over resists
polymer fabrication
2007-07-06
hammouche khales
2007-07-06
emelianov
2007-07-09
Rashid, Mamun
anodic bonding and passivation layer thickness
2007-07-09
H.J. van der Linden
How to get a sheet of Cr film via E-beam evap.
2007-07-09
hung bost
2007-07-10
Shay Kaplan
2007-07-10
Anil Agiral
2007-07-10
Peter Svasek
redeposition of SiO2
2007-07-11
cal Bear
plasma etching of SiO2 and its selectivity over resists
2007-07-12
prabhu arumugam
plasma etching of SiO2 and its selectivity over resists
2007-07-12
Kirt Williams
Polystyrene bonding problem
2007-07-13
Rashid, Mamun
2007-07-13
Joseph Grogan
2007-07-13
Rashid, Mamun
plasma etching of SiO2 and its selectivity over resists
Kirt Williams
2007-07-12
Do an Google search for "etch rates micromachining" and look at the papers
publishing in JMEMS.
Several resists, silicon oxides, and etchers are evaluated.
    --Kirt Williams

----- Original Message -----
From: "prabhu arumugam" 
To: "General MEMS discussion" 
Sent: Thursday, July 12, 2007 10:05 AM
Subject: [mems-talk] plasma etching of SiO2 and its selectivity over resists

> Hello all,
> Could you please tell me some good references for
> plasma etching of SiO2 and its selectivity over
> resists.

reply
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