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MEMSnet Home: MEMS-Talk: How to grind or polish sapphire substrate?
How to grind or polish sapphire substrate?
2007-07-18
jiaxing Yang
How to grind or polish sapphire substrate?
jiaxing Yang
2007-07-18
We have sample GaN on sapphire substrate, anyone know
how can I get the substrate thinner? if use sandpaper,
what kind of paper can be used?
thanks very much!!
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