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MEMSnet Home: MEMS-Talk: Etch simulation software
Etch simulation software
2007-07-24
Sven Holmström
2007-07-28
Andrea Mazzolari
Etch simulation software
Sven Holmström
2007-07-24
Dear all,

We plan to purchase a etch simulation software. I have only been able
to find two programs that seems reasonable updated: ANISE (part of
Intellisuite) and Etch3D (part of CoventorWare).

But. I haven't been able to find any comparisons between them. I know
that ANISE is used by a lot of institutions. Since we already use
Coventor Etch3D might be convenient for us, but we need to know if it
is as good as ANISE?

Is there some new general etch simulator in addition to these two,
that can compete?

/Sven Holmström, Koc University, Istanbul, Optical Microsystems
Laboratory (http://mems.ku.edu.tr/)

Work phone: +90 212 338 1772
Mobile phone:+90 05383365642
FAX: +90-212-338-1548 (Please note my name)
E-mail: sholmstrom@ku.edu.tr

Work address:
Koç Universitesi
Dept. of Electrical Engineering
Rumeli Feneri Yolu, Sariyer
34450, Istanbul-Turkey
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