Did you tried  VisualTapas ?
http://www.fyslab.hut.fi/~mag/VisualTAPAS/Home.html

Best regards,
Andrea

> Dear all,
>
> We plan to purchase a etch simulation software. I have only been able
> to find two programs that seems reasonable updated: ANISE (part of
> Intellisuite) and Etch3D (part of CoventorWare).